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Definition: deep ultraviolet light


A type of light that has been required to make chips. Deep ultraviolet light has a wavelength of 193 nanometers, and while it is not state of the art, it is still used to make many chips that do not require the greatest transistor density.

Regular light has a wavelength of 380 to 740 nm, while deep ultraviolet (DUV) ranges from 248 to 193 nm. For all the wavelengths used to make chips, see ultraviolet light.

Today, the EUV light required to make state-of-the-art chips is generated by machines from ASML. Operating in a vacuum and using mirrors rather than lenses, EUV enables the creation of chips from 7 to 2 nm (see chip feature size). See ASML and EUV machine.