Definition: FOUP

(Front Opening Unified Pod) A sealed plastic container that is used to transport 300 mm wafers from station to station in a semiconductor fab. The FOUP typically holds 25 wafers and its front-opening door was designed for robotic access. FOUPs are generally moved on overhead rails.

SMIF Pods
Partially automated SMIF (Standard Mechanical Interface) Pods are used to transport 200 mm and smaller wafers. Not fully automated like FOUPs, SMIF Pods use a removable cassette, and the door opens from the bottom rather than the front.

FOSB
A front-opening shipping box (FOSB) is used to transport wafers between different fabs.